Abstract:
With the rapid development of the integrated circuit (IC) industry, organic wastewater generated during manufacturing has garnered significant attention. This wastewater is characterized by its complex composition, high toxicity and poor biodegradability. The safe disposal and resource recovery of such organic wastewater are of great significance for the sustainable development of the IC industry. However, a comprehensive literature review discussing resource and energy recovery alongside advanced detoxification of organic wastewater in the IC industry is still lacking. This paper systematically reviews the main sources and physichemical properties of IC organic wastewater, and analyzes the occurrence of bulk organic pollutants (e.g., tetramethylammonium hydroxide, N-methylpyrrolidone, isopropanol) and trace emerging contaminants (e.g., per- and polyfluoroalkyl substances, PFAS). On this basis, the current research status of IC organic wastewater treatment is evaluated from three perspectives: resource recovery, energy conversion, and advanced detoxification. For high concentration single-component organic waste liquid/wastewater, priority is given to the direct recovery or downgraded utilization of high-purity components. For medium-to-high concentration organic wastewater, methane production through anaerobic digestion represents an important pathway for resource utilization. For the advanced treatment of low-concentration wastewater and effluent after biological treatment, an advanced detoxification strategy integrating separation-enrichment and destructive mineralization is recommended. The advantages, disadvantages, and applicability of various technologies are systematically compared from three dimensions: application scope (e.g., removal rate, mineralization degree), economic feasibility (e.g., energy consumption, operational cost), and engineering applicability (e.g., maturity, scalability for real IC wastewater). In addition, this paper explores current challenges in IC organic wastewater treatment, including insufficient systematic validation under real wastewater conditions and the absence of dedicated techno-economic assessments. Finally, future development trends regarding intelligent technology, integrated processes, and life-cycle pollution control are outlined, providing theoretical references and technical support for the efficient and green treatment of IC organic wastewater.