高级检索

    集成电路有机废水处理技术研究进展与趋势

    Research Progress and Future Trends in Organic Wastewater Treatment Technologies for the Integrated Circuit Industry

    • 摘要: 随着集成电路产业的飞速发展,其生产过程中产生的有机废水问题日益凸显。集成电路有机废水成分复杂、毒性强、可生化性差,其安全处置和资源化对于行业可持续发展具有重要意义。本文系统梳理了集成电路有机废水的主要来源、分类与理化特性,分析了常规有机污染物(四甲基氢氧化铵(TMAH)、N-甲基吡咯烷酮、异丙醇等)与微量新污染物(全氟和多氟烷基物质(PFAS))的赋存。在此基础上,从资源回收、能源转化以及深度脱毒三个方面综述了集成电路有机废水处理的研究现状。本文提出分级分类、梯度利用的全流程处理范式,针对组分单一的高浓度有机废液/废水,优先进行高纯度组分的直接回收或降级利用。中高浓度可生化废水实施能源转化,低浓度高毒性废水则采用分离富集和破坏矿化的深度脱毒策略。在此基础上本文评估了各技术的适用范围、经济可行性和技术成熟度,指出当前研究在真实废水条件下的系统性验证不足,技术经济性评估普遍缺失等问题。最后,探讨了当前集成电路有机废水处理面临的挑战,展望了未来发展趋势,旨在为行业的绿色发展提供理论支撑。

       

      Abstract: With the rapid development of the integrated circuit (IC) industry, organic wastewater generated during its manufacturing has garnered great attention. This wastewater is characterized by complex composition, high toxicity and poor biodegradability. The safe disposal and resource recovery of such organic wastewater are of great significance for the sustainable development of the IC industry. However, a comprehensive literature review discussing resource and energy recovery alongside advanced detoxification of organic wastewater in the IC industry is still lacking. This paper systematically reviews the main sources and physical-chemical properties of IC organic wastewater, and analyzes the occurrence of bulk organic pollutants (e.g., tetramethylammonium hydroxide, N-methylpyrrolidone, isopropanol, acetone, and propylene glycol methyl ether acetate) and trace emerging contaminants (e.g., per- and polyfluoroalkyl substances, PFAS). On this basis, the current research status of IC organic wastewater treatment is reviewed from three perspectives: resource recovery, energy conversion, and deep detoxification. For high-concentration, single-component organic waste liquids/wastewaters, priority is given to the direct recovery or downgraded utilization of high-purity components. For example, cation exchange resins have been successfully used to recover tetramethylammonium hydroxide. For medium-to-high concentration organic wastewater, methane production through anaerobic digestion represents an important pathway for resource utilization. For the advanced treatment of low-concentration wastewater and effluent after biological treatment, physical and chemical processes such as adsorption and oxidation are commonly employed. The advantages, disadvantages, and applicability of various technologies are systematically compared from three dimensions: technical efficiency (e.g., removal rate, mineralization degree), economic feasibility (e.g., energy consumption, operational cost), and engineering applicability (e.g., maturity, scalability for real IC wastewater). In addition, this paper explores the current challenges in IC organic wastewater treatment, including the relatively low economic benefits of resource recycling, the inhibition of biological treatment by high concentrations of toxicants (such as tetramethylammonium hydroxide), and destruction of PFAS within complex water matrices. Finally, future development trends regarding intelligent technology, integrated processes, and full-life-cycle pollution control are outlined, providing theoretical references and technical support for the efficient and green treatment of IC organic wastewater.

       

    /

    返回文章
    返回